SECURITIES AND EXCHANGE COMMISSION
                             WASHINGTON, D.C. 20549

                                  SCHEDULE 13G
                                 (RULE 13D-102)

                    INFORMATION TO BE INCLUDED IN STATEMENTS
                  FILED PURSUANT TO RULES 13D-1(B)(C), AND (D)
                          AND AMENDMENTS THERETO FILED
                           PURSUANT TO RULE 13D-(2)(B)

                                (AMENDMENT NO. 5)


                              MKS Instruments, Inc.
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                                (Name of Issuer)

                                  Common Stock
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                         (Title of Class of Securities)

                                   55306N 10 4
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                                 (CUSIP Number)

                                December 31, 2004
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             (Date of Event Which Requires Filing of this Statement)

Check the appropriate box to designate the rule pursuant to which this Schedule
is filed:

        [ ]   Rule 13d-1(b)

        [ ]   Rule 13d-1(c)

        [X]   Rule 13d-1(d)

CUSIP No. 55306N 10 4                 13G                       Page 2 of Page 6


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1       NAMES OF REPORTING PERSONS.
        I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS (ENTITIES ONLY)

        Claire R. Bertucci

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2       CHECK THE APPROPRIATE BOX IF A MEMBER OF A GROUP*
                                                                         (a) [ ]
                                                                         (b) [ ]
        Not Applicable

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3       SEC USE ONLY


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4       CITIZENSHIP OR PLACE OF ORGANIZATION

        United States

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                        5      SOLE VOTING POWER

                               0
                        --------------------------------------------------------
                        6      SHARED VOTING POWER     
   NUMBER OF SHARES                                    
BENEFICIALLY OWNED BY          4,546,784(1)             
EACH REPORTING PERSON   --------------------------------------------------------
         WITH           7      SOLE DISPOSITIVE POWER                           
                                                                                
                               4,546,784(1)                        
                        --------------------------------------------------------
                        8      SHARED DISPOSITIVE POWER                         
                                                                                
                               0                                                
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9       AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON

        9,558,000(1)

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10      CHECK BOX IF THE AGGREGATE AMOUNT IN ROW (9) EXCLUDES CERTAIN SHARES*

        Not Applicable

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11      PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW 9

        17.8%(1)

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12      TYPE OF REPORTING PERSON*

        IN

*    See Instructions before filling out

(1)  CONSISTS OF SHARES BENEFICIALLY OWNED AS OF JANUARY 31, 2005. SHARES
     REPORTED IN ROW 9 ALSO INCLUDE 5,011,216 SHARES BENEFICIALLY OWNED BY JOHN
     R. BERTUCCI, MRS. BERTUCCI'S SPOUSE, AS OF JANUARY 31, 2005 WITH RESPECT TO
     WHICH MRS. BERTUCCI DISCLAIMS BENEFICIAL OWNERSHIP.

CUSIP No. 55306N 10 4                 13G                       Page 3 of Page 6


Item 1(a).        Name of Issuer:

                  MKS Instruments, Inc.

Item 1(b).        Address of Issuer's Principal Executive Offices:

                  90 Industrial Way

                  Wilmington, MA  01887

Item 2(a).        Name of Person Filing:

                  Claire R. Bertucci

Item 2(b).        Address of Principal Business Office or, if None, Residence:

                  The address of the reporting persons is:

                           c/o MKS Instruments, Inc.

                           90 Industrial Way

                           Wilmington, MA  01887

Item 2(c).        Citizenship:

                  Mrs. Bertucci is a citizen of the United States.

Item 2(d).        Title of Class of Securities:

                  Common Stock, no par value per share.

Item 2(e).        CUSIP Number:

                  CUSIP No. 55306N 10 4

Item 3.           If This Statement is Filed Pursuant to Rule 13d-1(b), or
                  13d-2(b) or (c), Check Whether the Person Filing is a: Not
                  Applicable.

                  (a)  [ ]   Broker or dealer registered under Section 15 of
                             the Exchange Act.

                  (b)  [ ]   Bank as defined in Section 3(a)(6) of the Exchange
                             Act.

                  (c)  [ ]   Insurance company as defined in Section 3(a)(19)
                             of the Exchange Act.

                  (d)  [ ]   Investment company registered under Section 8 of
                             the Investment Company Act.

CUSIP No. 55306N 10 4                 13G                       Page 4 of Page 6

                  (e)  [ ]   An investment adviser in accordance with Rule
                             13d-1(b)(1)(ii)(E);

                  (f)  [ ]   An employee benefit plan or endowment fund in
                             accordance with Rule 13d- 1(b)(1)(ii)(F);

                  (g)  [ ]   A parent holding company or control person in
                             accordance with Rule 13d- 1(b)(1)(ii)(G);

                  (h)  [ ]   A savings association as defined in Section 3(b)
                             of the Federal Deposit Insurance Act;

                  (i)  [ ]   A church plan that is excluded from the definition
                             of an investment company under Section 3(c)(14) of
                             the Investment Company Act;

                  (j)  [ ]   Group, in accordance with Rule 13d-1(b)(1)(ii)(J).

Item 4.           Ownership:

                  The filing of this statement shall not be construed as an
admission that any of the reporting persons are, for the purpose of Section
13(d) or 13(g) of the Act, the beneficial owners of any securities covered under
this Statement.

                  (a)  Amount Beneficially Owned by Claire R. Bertucci:
                       9,558,000 shares(2)

                  (b)  Percent of Class:  17.8%(2)

                  (c)  Number of Shares as to which Claire R. Bertucci has:

                       (i) Sole power to vote or to direct the vote: 0 shares

                       (ii) Shared power to vote or to direct the vote:
                  9,558,000 shares(2)

                       (iii) Sole power to dispose or to direct the disposition
                  of: 9,558,000(2) shares

                       (iv) Shared power to dispose or to direct the disposition
                  of: 0 shares



Item 5.           Ownership of Five Percent or Less of a Class.

                  If this statement is being filed to report the fact that as of
the date hereof the reporting person has ceased to be the beneficial owner of
more than 5% of the class of securities, check the following: [ ].

(2)  CONSISTS OF SHARES BENEFICIALLY OWNED AS OF JANUARY 31, 2005. SHARES
     REPORTED IN ROW 4(a) ALSO INCLUDE 5,011,216 SHARES BENEFICIALLY OWNED BY
     JOHN R. BERTUCCI, MRS. BERTUCCI'S SPOUSE, AS OF JANUARY 31, 2005 WITH
     RESPECT TO WHICH MRS. BERTUCCI DISCLAIMS BENEFICIAL OWNERSHIP.

CUSIP No. 55306N 10 4                 13G                       Page 5 of Page 6


Item 6.           Ownership of More than Five Percent on Behalf of Another
                  Person.

                  Not applicable

Item 7.           Identification and Classification of the Subsidiary Which
                  Acquired the Security Being Reported on by the Parent Holding
                  Company.

                  Not applicable

Item 8.           Identification and Classification of Members of the Group.

                  Not applicable

Item 9.           Notice of Dissolution of Group.

                  Not applicable

Item 10.          Certification.

                  Not applicable

CUSIP No. 55306N 10 4                 13G                       Page 6 of Page 6


                                   SIGNATURES


         After reasonable inquiry and to the best of the knowledge and belief of
each of the undersigned, each of the undersigned hereby certifies that the
information set forth in this statement is true, complete and correct.

Dated:  February 15, 2005
                                                     /s/ Claire R. Bertucci
                                                     ---------------------------
                                                     Claire R. Bertucci